气体纯度及其表示法

<p class="pgc-p" style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: -1px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial" data-pm-slice="0 0 []" data-track="1">由于气体分为简单气体、多组分气体、混合气体和有机化合物气体，构成气体的物质（或元素）可称为气体组分。因此，气体纯度的含义可以理解为除气体成分外还包含许多其他物质。例如，氮的纯度是指除N组分外，O2、H2、Ar、CO2、H2O、金属和灰尘颗粒等杂质的量；氨的纯度是指除NH3外，O2、N2、CO2、H2O和灰尘颗粒等杂质的量；另一个例子是氮气和氦气的混合物，它指的是N2和He组分旁边的杂质量，如O2、CO2、H2O尘埃颗粒。 <div class="pgc-img" style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: 0px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial"> <p style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: -1px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial" data-track="2">参考气体纯度的方法有很多，如普通清洁气体、高纯度气体、电子清洁气体、超纯气体等。随着超大集成电路（VLSI）和超大规模集成电路（ULSI）的发展，出现了VLSI和ULSI级的纯气体。这些公式并不十分准确，但它们只给出了气体纯度的粗略描述，而不是气体纯度的大小。有两种主要方法可以准确地表示气体的纯度。即： <p style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: -1px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial" data-track="3">1.以百分比表示，如99%、99.5%、99.9%、99.999%、99.9999%、99.999%、99.999 9%、99.99 9%、99.99.999%等。 <p style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: -1px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial" data-track="4">2.使用“N”显示，如3N、5N、4.8N、5.5N、6N、7N等。数字N对应于（1）中的数字“9”，小数点后的数字表示小于“9”的数字。例如，4N（99.99%）6N（99.9999%）7N（99.999%）4.8N（99.998%）5.5N（99.99.95%）等。 <p style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: -1px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial" data-track="5">根据气体纯度的不同，气体纯度一般分为四级，即普通气体、纯气体、高纯度气体和超高纯度气体。下表显示了气体纯度和设备生产工艺的应用。 <div class="pgc-img" style="FONT-SIZE: 14px; FONT-FAMILY: \"Microsoft YaHei\"; WHITE-SPACE: normal; WORD-SPACING: 0px; TEXT-TRANSFORM: none; FONT-WEIGHT: 400; COLOR: rgb(51,51,51); PADDING-BOTTOM: 0px; FONT-STYLE: normal; PADDING-TOP: 0px; PADDING-LEFT: 0px; ORPHANS: 2; WIDOWS: 2; MARGIN: 0px; LETTER-SPACING: normal; PADDING-RIGHT: 0px; BACKGROUND-COLOR: rgb(255,255,255); TEXT-INDENT: 0px; overflow-wrap: break-word; font-variant-ligatures: normal; font-variant-caps: normal; -webkit-text-stroke-width: 0px; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial">

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